Training workshop on
OPTICAL 3-D SURFACE METROLOGY
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(Contact trainer for in-house training)
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Synopsis
​Optical non-contact 3-D profilers are widely used in the precision manufacturing industry for 3-D surface measurement, inspection, quality control, surface characterization, texture analysis, and roughness measurement. A sound understanding of the working principles of the optical 3-D metrology instruments, their capabilities and limitations is necessary for the successful development, integration, calibration, and application of these high-tech instruments in the industry and research.
In this two-day workshop, participants will be guided into understanding the basic principles behind a common 3-D optical profiler, namely the KLA Zeta-20 profiler. The basic working principles of the six core enabling technologies built into the microscope, namely the ZDotTM grid structured illumination technology, differential interference contrast imaging, vertical scanning interferometry, shearing interferometry, infinite focus technology, and deflectometry will be covered. Participants will also learn about 2-D and 3-D roughness parameters and their measurement, made possible by analyzing the measured data obtained using the 3-D profiler.
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Course outcomes​
Understand the principle behind confocal optical systems
Understand the principle behind the ZDotTM confocal grid structured illumination technology
Understand the principle behind infinite focus technology for true color images
Understand the basics of laser interferometry
Understand how white light interferometer enables nanoscale measurement
Distinguish between vertical scanning interferometry, shearing interferometry, deflectometry and differential contrast method
Distinguish between amplitude, spacing, hybrid, and functional 2-D and 3-D surface roughness
parameters
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Course content:
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Day 1 – Confocal microscopy, ZDotTM structured grid technology and interferometry
Basic principle of confocal optical systems
Laser scanning confocal microscopy
Confocal grid structured illumination technology
Basic principle of laser interferometry
Vertical scanning white-light interferometry
Differential interference contrast microscopy
Shearing interferometry and deflectometry
Activity 1 – Determine the smallest displacement that can be detected in a Michelson interferometer when using an 8-bit detector
Activity 2 – Determine the phase difference between two interfering beams
Activity 3 – Determine depth of depression for a given fringe shift
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Day 2 – 2-D and 3-D surface roughness metrology
Roughness, waviness and form
Cut-off wavelength and ISO4288 standard
Stylus roughness testers
Atomic force microscope (AFM)
Amplitude, spacing, hybrid and functional roughness parameters
3-D (Areal) parameters
Activity 4 – Determine the roughness parameters Ra, Rq, Rsk and Rku for a given trace
Activity 5 – Draw the bearing area curve for a given trace and estimate Rpk, Rvk, MR1 and MR2
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Course duration: 14 hours (over two days)
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Who should attend: Junior engineers, senior technicians or anyone new to 3-D optical metrology instruments and surface roughness measurement.
Maximum number of participants: 15
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Trainer fee: Contact trainer for quotation
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